Senior Research Engineer / Senior Research Scientist (MEMS Process Integration)

The Micro Electro Multiphysical systems (MEMS) team is looking for a MEMS fabrication process integrator. The research engineer will work with a multidisciplinary team to develop processes for the fabrication of MEMS-based acoustic/ultrasonic transducer, RF devices and other sensor and actuator devices based on piezo materials, such as PZT and ScAlN films.

The job responsibilities will include:

• Work with design and process module team to develop differentiated and robust MEMS integration platforms based on PZT, ScAlN films, and other piezo materials.

• Design integration process flows for upcoming piezoelectric MEMS devices, design and execute DOEs to realize the devices.

• Conduct integration and fabrication of thin-film piezoelectric ultrasonic transducers, acoustic devices and RF devices.

• Manage wafer lot progress in the cleanroom, conduct inspection and characterization of MEMS devices/structures and failure analysis, using metrology tools such as DRSEM, CDSEM, ellipsometers, and microscopes.

• Communicate with internal and external customers on the project progress and manage the project execution.

JOB REQUIREMENTS

• BS/MS/PhD in Electronics Engineering/Chemical Engineering/Mechanical Engineering/Material Engineering/Applied Physics or equivalent.

• At least 5 years of experience in semiconductor process modules, integration or MEMS related modules and integration.

• Good knowledge and hands-on experience in microfabrication processes (e.g. etch, lithography, CMP, PVD and PECVD); process recipe tuning experience is a plus.

• Good knowledge and hands-on experience in microfabrication inspection and characterization methods, and data analysis of wafer-level measurements.

• Good communication and presentation skills, ability to work independently, as well as being an excellent team player.

• Continuously seeks opportunities to expand knowledge and skills, staying up to date with emerging trends and advancements in the field.

• Capable of conceptualizing and implementing creative approaches to address research questions and technology development.

The above eligibility criteria are not exhaustive. A*STAR may include additional selection criteria based on its prevailing recruitment policies. These policies may be amended from time to time without notice. We regret that only shortlisted candidates will be notified.