Participating in development project with RD Engr and to set-up unit process recipe on available tools / BKM recipe / process flow to meet development success criteria.
Participating in continuous improvement activities (Defect improvement, Process stability)
Oversee overall yield improvement activities with the module and YE.
Work with process engineers on process running condition ( DOE ) versus tool capability.
Able to communicate well between Module and YE / RD / QA / Etc
Able to work with YE / RD / CP to develop COT+ / CUSP process flow
Major Responsibilities
Process Management
To set-up new process recipe, provide recommendation and integration guidelines to RD Engr and module PE for new development project.
Coordinate new process or new technology evaluation/discussion between module and YE & R/D Engr.
To identify process limitations, assess process manufacturability and process integration margin on existing tool for new development.
Able to Pre review and define COT+ / CUSP before start evaluation.
Capable to design the DOE to solve the in line / PCM / Sort issue
Yield Improvement
Utilize Best Know method (BKM) recipe and process flow for the production.
Reduce unnecessary process step for the production.
Task Force Team (TFT) participation or involve PSM to solve or improve current production issue.
Facilitate engineers for problem solving through DOE
POSITION REQUIREMENT
Qualification: Bachelor Science/ Degree/ Masters / Dr in any Engineering related field
Experience: Experience in semiconductor to enable the job holder to deal with a wide variety of problems (> 3 years)
Skills/Competencies: The job holder will be accepted as a technical expert in his own field who is fully competent to handle both routine and non-routine matters.
Wafer Fab process recipe set-up experience and hands-on skill set below for each headcount:
POSITION 1: IMPLANT TECHNICAL COMPETENCY
Experience with AMAT VIISTAs & Purion Xe Ion Implanters preferable.
Good knowledge with CMOS processes and unit process development experience will be added advantage
POSITION 2: DRY ETCH TECHNICAL COMPETENCY
Experience in Silicon Oxide, Silicon Nitride, and Si/Poly-Si etch process.
Familiar with AMAT Centura Super-e, AMAT Centura DPS R1 (Poly), AMAT Centura DPS+ (Poly) platform.
Experience in SiGe etch will be a surplus.
POSITION 3: WET BENCH / FURNACE TECHNICAL COMPETENCY
Experience in Silicon Nitride, Silicon oxide and Poly wet etch process and wet cleaning process
Familiar with various wetbench tool type including dipping (DNS/Kaijo), spray (FSI) and backside film removal tool
Experience in Furnace Deposition process, Silicon Nitride, Polysilicon and Oxidation process. Hands on skill like recipe set-up and process tuning is important.
POSITION 4: THIN FILM HDP/PECVD TECHNICAL COMPETENCY
Familiar and process hands on experience with Applied Material HDP CVD process / PECVD process on Producer/ Novellus for recipe set-up and fine tuning.
Familiar and process hands on experience with Applied Material Endura Sputtering System for PVD for recipe set-up and fine tuning.
Involved in continuous improvement project, process recipe optimization and development.
POSITION 5: PHOTOLITHOGRAPHY TECHNICAL COMPETENCY
Experience with New module setup and qualification
Hands on experience with Nikon stepper/scanner and Tel Track Act-8. Including recipe creation, stepper job creation.
Familiar with 0.11um technology node design rule and KrF RET